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| Tên thương hiệu: | ZMSH |
| MOQ: | 1 |
| giá bán: | by case |
| Chi tiết bao bì: | thùng tùy chỉnh |
| Điều khoản thanh toán: | T/t |
With the rapid advancement of the semiconductor industry, the demand for higher performance in processing and inspection equipment continues to increase. Leveraging years of experience in motion control and ultra-precision positioning, we have developed a planar H-type dual-axis ultra-precision air-bearing stage.
The stage features a finite-element-optimized silicon carbide ceramic structure combined with compensated air-bearing technology, delivering both exceptional accuracy and superior dynamic performance. It is widely applied in:
Semiconductor processing and inspection
Micro/nano fabrication
Nanometer-level fly-cutting and polishing
High-speed scanning applications
Silicon carbide ceramic air-bearing guideway, ultra-high precision
Maximum speed 1 m/s, acceleration up to 4 g, fast settling time
Y-axis dual-drive gantry structure for high load capacity
Optional encoder: optical grating or laser interferometer
Positioning accuracy: ±0.15 μm; repeatability: ±75 nm
Optimized cable management for clean design and stable operation
Customizable design for specific applications
SiC Ceramic Structure: ~5× stiffness of aluminum alloy and ~5× lower thermal expansion coefficient, enhancing tracking accuracy and stability under high-speed operation.
Air-Bearing Compensation: Proprietary compensation method improves stiffness and load capacity, ensuring fast motion and rapid settling.
Dynamic Performance: Achieves 1 m/s velocity and 4 g acceleration, suitable for high-throughput processes.
Flexible Integration: Compatible with active/passive vibration isolation, rotary stages, tilt modules, or wafer handling systems.
Cable Optimization: Carefully designed bending radius prevents motion-induced stress, ensuring long-term reliability.
Coreless Linear Motor: Delivers smooth motion with zero cogging force.
Multi-Motor Drive: Scanning and stepping axes are powered by multiple motors positioned near the load plane, improving straightness, flatness, and angular precision.
Thermal Management: Motors are thermally isolated and can be air- or water-cooled for high duty-cycle applications.
| Model | 400-400 | 500-500 | 600-600 |
|---|---|---|---|
| Axes | X (scan) / Y (step) | X (scan) / Y (step) | X (scan) / Y (step) |
| Travel (mm) | 400 / 400 | 500 / 500 | 600 / 600 |
| Accuracy (μm) | ±0.15 | ±0.2 | ±0.2 |
| Repeatability (nm) | ±75 | ±100 | ±100 |
| Resolution (nm) | 0.3 | 0.3 | 0.3 |
| Max Speed (m/s) | 1 | 1 | 1 |
| Acceleration (g) | 4 | 4 | 4 |
| Straightness (μm) | ±0.2 | ±0.3 | ±0.4 |
| Stability (nm) | ±5 | ±5 | ±5 |
| Max Load (kg) | 20 | 20 | 20 |
| Pitch (arc-sec) | ±1 | ±1 | ±1 |
| Roll (arc-sec) | ±1 | ±1 | ±1 |
| Yaw (arc-sec) | ±1 | ±1 | ±1 |
Test Conditions:
Air supply: clean and dry, dew point ≤ 0°F, particle filtration ≤ 0.25 μm, or 99.99% pure nitrogen.
Accuracy measured 25 mm above stage center, at 20±1 °C, 40–60% RH.
Semiconductor lithography, inspection, and wafer handling
Micro/nano fabrication and metrology
Precision optics manufacturing and interferometry
Aerospace and scientific ultra-precision motion systems
